This e-monograph on Smart Sensors & MEMS has been written by Prof. H.K. Verma on the basis of his experience of teaching this subject for seventeen years (2005-2021) at the Indian Institute of Technology, Roorkee and Sharda University, Greater Noida, and his R&D work on the application and interfacing of smart sensors and Smart MEMS Devices in several projects. The monograph is suitable for teachers and students of almost all disciplines of engineering and technology.
This 2021-edition of the monograph on Smart Sensors & MEMS comprises four chapters as under, of which the first chapter is written specially for the beginners:
Chapter-1: Basics of Sensor, Actuator and Transducer (2017)
Chapter-2: Smart Sensors and MEMS (2021)
Chapter-3: Case Studies of Smart Sensors and Smart MEMS Devices (2021)
Chapter-4: Manufacturing Technologies for MEMS & Smart Sensors (2021)